Principles of Lithography (SPIE PRESS Monograph Vol. PM97)
Released: Jul 01, 2001
Format: Hardcover, 410 pages
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Description:
The ability to pack large numbers of individual transistors in a small area of silicon has enabled the great functionality of modern microelectronics, specifically integrated circuits. This book focuses on photolithography--the method used for patterning nearly all integrated circuits fabricated today. It is a comprehensive introduction for novice lithographers and a valuable reference for professionals.
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