<p>The ability to pack large numbers of individual transistors in a small area of silicon has enabled the great functionality of modern microelectronics, specifically integrated circuits. This book focuses on photolithography--the method used for patterning nearly all integrated circuits fabricated today. It is a comprehensive introduction for novice lithographers and a valuable reference for professionals.</p>

Principles of Lithography (SPIE PRESS Monograph Vol. PM97)

Science & Math

Levinson, Harry J.

Physics

Bellingham, Washington, U.S.A.: Society of Photo Optical

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Books by Bellingham, Washington, U.S.A.: Society of Photo Optical

See the best price to sell, buy or rent books by the Bellingham, Washington, U.S.A.: Society of Photo Optical publisher. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Principles of Lithography (SPIE PRESS Monograph Vol. PM97)