The ability to pack large numbers of individual transistors in a small area of silicon has enabled the great functionality of modern microelectronics, specifically integrated circuits. This book focuses on photolithography--the method used for patterning nearly all integrated circuits fabricated today. It is a comprehensive introduction for novice lithographers and a valuable reference for professionals.

Principles of Lithography (SPIE PRESS Monograph Vol. PM97)

Science & Math

Levinson, Harry J.

Physics

Bellingham, Washington, U.S.A.: Society of Photo Optical

The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. 
 This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. 
 Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

Principles of Lithography

Engineering & Transportation

Engineering

Society of Photo Optical

This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, and nonlinear overlay models, have become much more significant to practicing lithographers, and more extensive treatments are therefore provided. EUV lithography is on the threshold for use in high-volume manufacturing, at nodes where a number of complex phenomena are relevant, and the chapter on EUV lithography has been expanded accordingly. New references and homework problems have been added. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

See the best price to sell, buy, or rent books by Levinson, Harry J.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Books by Levinson, Harry J.

See the best price to sell, buy, or rent books by Levinson, Harry J.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Principles of Lithography (SPIE PRESS Monograph Vol. PM97)

Principles of Lithography

Principles of Lithography