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Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science, 270)

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Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science, 270) image
ISBN-10:

3319939246

ISBN-13:

9783319939247

Author(s): Claeys, Cor; Simoen, Eddy
Edition: 1st ed. 2018
Released: Aug 22, 2018
Publisher: Springer
Format: Hardcover, 471 pages
Related ISBN: 9783030067472
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Description:

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

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