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Rapid Thermal Processing of Semiconductors (Microdevices)

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ISBN-10:

148991806X

ISBN-13:

9781489918062

Author(s): Hesketh, Peter J.; Borisenko, Victor E. E.
Edition: Softcover reprint of the original 1st ed. 1997
Released: Jun 20, 2013
Publisher: Springer
Format: Paperback, 380 pages
Related ISBN: 9780306450549
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Description:

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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