Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Rapid Thermal Processing of Semiconductors (Microdevices)

Science & Math

Hesketh, Peter J.

Borisenko, Victor E. E.

Chemistry

Springer

See the best price to sell, buy, or rent books by Borisenko, Victor E. E.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Books by Borisenko, Victor E. E.

See the best price to sell, buy, or rent books by Borisenko, Victor E. E.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Rapid Thermal Processing of Semiconductors (Microdevices)