<p>Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.</p>

Rapid Thermal Processing of Semiconductors (Microdevices)

Science & Math

Borisenko, Victor E.

Hesketh, Peter J.

Chemistry

Springer

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Borisenko, Victor E. E.

See the best price to sell, buy, or rent books by Hesketh, Peter J.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Books by Hesketh, Peter J.

See the best price to sell, buy, or rent books by Hesketh, Peter J.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Rapid Thermal Processing of Semiconductors (Microdevices)

Rapid Thermal Processing of Semiconductors (Microdevices)