Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Released: Mar 13, 1997
Format: Paperback, 776 pages
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Description:
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
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