Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)

Engineering & Transportation

Prosenjit Rai-Choudhury

Engineering

SPIE--The International Society for Optical Engineering

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.
Contents
 - Preface - MEMS/MOEMS Technology Capabilities and Trends - Operation and Design of MEMS/MOEMS Devices - Optical Microsystem Modeling and Simulation - The Digital Micromirror Device: A Micro-Optical Electromechanical Device for Display Applications - Optical Waveguides and Silicon-Based Micromachined Architectures - Silicon Micromachines in Optical Communications Networks: Tiny Machines for Large Systems - Assembly and Test for MEMS and Optical MEMS - MEMS, Microsystems, Micromachines: Commercializing an Emergent Disruptive Technology - Index

MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

Computers & Technology

SPIE Publications

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography

See the best price to sell, buy, or rent books by Prosenjit Rai-Choudhury. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Books by Prosenjit Rai-Choudhury

See the best price to sell, buy, or rent books by Prosenjit Rai-Choudhury. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)

MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography