Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
Description:
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Best prices to buy, sell, or rent ISBN 9780819497864
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