Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication (Spie Press Monograph, Pm39-Pm40)
ISBN-10:
0819423793
ISBN-13:
9780819423795
Author(s): Prosenjit Rai-Choudhury
Edition: illustrated Edition
Released: Oct 05, 1997
Format: Paperback, 700 pages
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Description:
Copublished with IEE. This handbook contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Eleven chapters cover key aspects of micromachining and microfabrication, including numerous device applications.
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