Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)
ISBN-10:
0815512201
ISBN-13:
9780815512202
Author(s): Cuomo, Jerome J.; Rossnagel, Stephen M.
Edition: 1
Description:
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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