<p>Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.</p>

Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis

Kaufman, Harold R.

Cuomo, Jerome J.

Rossnagel, Stephen M.

Reference

Noyes Publications

<p>This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.</p>

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Science & Math

Westwood, William D.

Chemistry

William Andrew

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

Engineering & Transportation

Engineering

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Books by Rossnagel, Stephen M.