Introductory MEMS: Fabrication and Applications
ISBN-10:
1489984216
ISBN-13:
9781489984210
Author(s): Adams, Thomas M.; Layton, Richard A.
Edition: 2010
Description:
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
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