Introductory MEMS: Fabrication and Applications
1489984216
9781489984210
Description:
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested pedagogical structure and an accessible writing style.
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- Semantics of concurrent computation: Proceedings of the international symposium, Évian, France, July 2-4, 1979 (Lecture notes in computer science)Adams, Thomas M.ISBN-13:9780387095110
- Introductory MEMS: Fabrication and ApplicationsAdams, Thomas M.; Layton, Richard A.Edition:2010ISBN-13:9780387095103
- Semantics of concurrent computation: Proceedings of the international symposium, Évian, France, July 2-4, 1979 (Lecture notes in computer science)Adams, Thomas M.ISBN-13:9780387095110
- Introductory MEMS: Fabrication and ApplicationsAdams, Thomas M.; Layton, Richard A.Edition:2010ISBN-13:9780387095103
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