MEMS Reliability (MEMS Reference Shelf)
ISBN-10:
1461427363
ISBN-13:
9781461427360
Author(s): Hartzell, Allyson L. L.; da Silva, Mark G.
Edition: 2011
Description:
This book focuses on the reliability and manufacturability of MEMS at a fundamental level. It demonstrates how to design MEMs for reliability and provides detailed information on the different types of failure modes and how to avoid them.
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