Handbook of Micromachining and Microfabrication Volume 2: Micromachining and Microfabrication

Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication. This handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve as a reference book for experts. The material is presented in such a manner as to allow the book to be utilised as a comprehensive reference book.

Also available:

Physics and Technology of Hetrojunction Devices - ISBN 9780863412042
Electrical Degradation and Breakdown in Polymers - ISBN 9780863411960

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