Chemical Vapor Deposition for Microelectronics: Principles, Technology, and Applications (Materials Science and Process Technology Series)
Description:
Presents an extensive, comprehensive study of chemical vapor deposition (CVD). Understanding CVD requires knowledge of fluid mechanics, plasma physics, chemical thermodynamics, and kinetics as well as homogenous and heterogeneous chemical reactions. This text presents these aspects of CVD in an integrated fashion, and also reviews films for use in integrated circuit technology.
Low Price Summary
Top Bookstores
We're an Amazon Associate. We earn from qualifying purchases at Amazon and all stores listed here.
DISCLOSURE: We're an eBay Partner Network affiliate and we earn commissions from purchases you make on eBay via one of the links above.
DISCLOSURE: We're an eBay Partner Network affiliate and we earn commissions from purchases you make on eBay via one of the links above.
Want a Better Price Offer?
Set a price alert and get notified when the book starts selling at your price.
Want to Report a Pricing Issue?
Let us know about the pricing issue you've noticed so that we can fix it.