Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport : Presented at the 1997 International Mechanical ... Exposition, November (Dsc (Series), Vol. 62.)
ISBN-10:
0791818438
ISBN-13:
9780791818435
Released: Jan 01, 1997
Publisher: Amer Society of Mechanical
Format: Hardcover, 284 pages
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Description:
The proceedings of the November 1997 symposium contain 38 papers on micromechanical systems and microscale energy transport. Part one covers devices and applications; fluidic systems; fabrication and actuators; and characterization and modeling. Part two covers laser absorption by metals and organic
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