Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport : Presented at the 1997 International Mechanical ... Exposition, November (Dsc (Series), Vol. 62.)
0791818438
9780791818435
Description:
The proceedings of the November 1997 symposium contain 38 papers on micromechanical systems and microscale energy transport. Part one covers devices and applications; fluidic systems; fabrication and actuators; and characterization and modeling. Part two covers laser absorption by metals and organic
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