Microelectromechanical Systems (Mems): Microscale Thermal Phenomena in Electronic Systems, Applications of Miocrofabrication to Fluid Mechanics, ... (Dsc (Series), Vol. 59.)

The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuat