Ion Implantation Technology: 17th International Conference on Ion Implantation Technology (AIP Conference Proceedings / Materials Physics and Applications)
ISBN-10:
0735406340
ISBN-13:
9780735406346
Edition: 1
Released: Mar 17, 2009
Publisher: American Inst. of Physics
Format: CD-ROM, 576 pages
Related ISBN: 9780735405974
Description:
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
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