Handbook of Static Secondary Ion Mass Spectrometry

A collection of spectral static SIMS spectra from over 100 compounds. Each compound listed has spectra over a 400 mass range for both positive and negative ions, with description of the spectra and information on how to extrapolate from this representative compound to others of its type. Covers five classes of compounds--metal oxides/hydroxides, metal salts, polymers, surface contaminants, and semiconductors--as well as other advanced-technology materials. Part I covers technique: instrumentation, physical basis of SIMS, spectroscopic information, sample handling, inter-instrument comparison, and references. Part II contains the actual spectra.