Semiconductor Devices: Physics and Technology

A basic introduction to the physical properties of semiconductor devices and fabrication technology, this work presents the theoretical and practical aspects of every step in device fabrication, with an emphasis on integrated circuits. Divided into three parts, it covers the basic properties of semiconductors and processes, emphasizing silicon and gallium arsenide; the physics and characteristics of semiconductor devices, bipolar and unipolar devices, and special microwave and photonic devices; and the latest processing technologies, from crystal growth to lithographic pattern transfer.