Electronic Materials: Science and Technology

Written as an intermediate-level text, this book will also be a good reference source for practicing engineers and scientists who are interested in electronic materials and devices. After presenting an introduction to electronic devices, the authors describe the processing of a complementary MOS (CMOS) circuit including fundamental physical and materials concepts. Other areas of electronic material processing covered include crystal growth, oxidation, diffusion, ion implantation, metallization, chemical vapor deposition, lithography concepts and tools, and etching. It also discusses advanced processes and possibilities for the future.