<p>Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.</p>

Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis

Kaufman, Harold R.

Cuomo, Jerome J.

Rossnagel, Stephen M.

Reference

Noyes Publications

Operation of Broad-Beam Sources

Science & Math

Commonwealth Scientific Report

R & D Tactics

Business & Money

Economics

Front Range Research

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Books by Kaufman, Harold R.