Introduction to Analytical Electron Microscopy

The birth of analytical electron microscopy (AEM) is somewhat obscure. Was it the recognition of the power and the development of STEM that signaled its birth? Was AEM born with the attachment of a crystal spectrometer to an otherwise conventional TEM? Or was it born earlier with the first analysis of electron loss spectra? It's not likely that any of these developments alone would have been sufficient and there have been many others (microdiffraction, EDS, microbeam fabrication, etc.) that could equally lay claim to being critical to the establishment of true AEM. It is probably more accurate to simply ascribe the present rapid development to the obvious: a combination of ideas whose time has come. Perhaps it is difficult to trace the birth of AEM simply because it remains a point of contention to even define its true scope. For example, the topics in this book, even though very broad, are still far from a complete description of what many call AEM. When electron beams interact with a solid it is well-known that a bewildering number of possible interactions follow. Analytical electron microscopy attempts to take full qualitative and quantitative advantage of as many of these interactions as possible while still preserving the capability of high resolution imaging. Although we restrict ourselves here to electron transparent films, much of what is described applies to thick specimens as well. Not surprisingly, signals from all possible interactions cannot yet (and probably never will) be attained simultaneously under optimum conditions.

Science & Math

Joseph I. Goldstein

Experiments, Instruments & Measurement

Plenum Press

<p>This book has evolved by processes of selection and expansion from its predecessor, Practical Scanning Electron Microscopy (PSEM), published by Plenum Press in 1975. The interaction of the authors with students at the Short Course on Scanning Electron Microscopy and X-Ray Microanalysis held annually at Lehigh University has helped greatly in developing this textbook. The material has been chosen to provide a student with a general introduction to the techniques of scanning electron microscopy and x-ray microanalysis suitable for application in such fields as biology, geology, solid state physics, and materials science. Following the format of PSEM, this book gives the student a basic knowledge of (1) the user-controlled functions of the electron optics of the scanning electron microscope and electron microprobe, (2) the characteristics of electron-beam-sample inter actions, (3) image formation and interpretation, (4) x-ray spectrometry, and (5) quantitative x-ray microanalysis. Each of these topics has been updated and in most cases expanded over the material presented in PSEM in order to give the reader sufficient coverage to understand these topics and apply the information in the laboratory. Throughout the text, we have attempted to emphasize practical aspects of the techniques, describing those instru ment parameters which the microscopist can and must manipulate to obtain optimum information from the specimen. Certain areas in particular have been expanded in response to their increasing importance in the SEM field. Thus energy-dispersive x-ray spectrometry, which has undergone a tremendous surge in growth, is treated in substantial detail.</p>

Scanning Electron Microscopy and X-Ray Microanalysis: A Text for Biologists, Materials Scientists, and Geologists

Dale E. Newbury

Patrick Echlin

David C. Joy

Charles Fiori

Eric Lifshin

Biological Sciences

Springer

Scanning Electron Microscopy and X-Ray Microanalysis

Joseph R. Michael

Nicholas W.M. Ritchie

John Henry J. Scott

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