Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications. The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject. The book covers additional topics such as: <ul> <li>Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation</li> <li>Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing</li> <li>X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy</li> <li>Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field</li> </ul> A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

Micro Electromechanical Systems (MEMS): Practical Lab Manual (IEEE Press Series on Sensors)

Science & Math

KUMAR, ABHISHEK

Goel, Sanket

Kumar, Sanjeet

Bhaiyya, Manish

Amreen, Khairunnisa

Kumar, Pavar Sai

Technology

Wiley-IEEE Press

Microscale fluorescence activated cell-sorting (micro-FACS) is a technology to identify and separate cells. Different elements of the micro-FACS, fabrication of opto-biochips, particle detection and velocity measurement, and flow switching, are studied in the present work. Biochips were fabricated by casting polydimethylsiloxane (PDMS) on the masters fabricated by direct laser-writing, and standard lithography and dry etching. In a different approach, biochips with integrated waveguides and microchannels were fabricated photolithographically on glass substrates using a negative photoresist, SU-8. In these opto-biochips, two excitation waveguides carrying two different wavelengths intersect the microchannel at two points separated and one large output waveguide carry fluorescence signals to a single filtered detector. The velocities of the microparticles were determined by the captured fluorescence from the double peak. Simulations based on beam propagation method were used to predict the performance of the SU-8 waveguides and the intensity at the two intersections has been compared with the experimental results.

Opto-biochips for Microcytometry: Author's summarizes his research work in the areas of Microfluidics and Photonics

Engineering & Transportation

Engineering

LAP LAMBERT Academic Publishing

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