Substrate Surface Preparation Handbook

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Substrate Surface Preparation Handbook image
ISBN-10:

1608072134

ISBN-13:

9781608072132

Author(s): Robertson, Max
Released: Nov 30, 2011
Format: Hardcover, 195 pages

Description:

Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.

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