Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems (Dsc (Series), Vol. 66.)
ISBN-10:
079181596X
ISBN-13:
9780791815960
Author(s): International Mechanical Engineering Congress and Exposition (1996 : Atlanta, Ga.); American Society of Mechanical Engineers Dynamic Systems and Control Division
Edition: Illustrated edition
Description:
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