Microsensors: Principles and Applications

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Microsensors: Principles and Applications image
ISBN-10:

0471941352

ISBN-13:

9780471941354

Edition: 1
Released: Aug 01, 1994
Publisher: wiley
Format: Hardcover, 344 pages

Description:

The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

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