Fundations Of MEMS

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Fundations Of MEMS image
ISBN-10:

0131472860

ISBN-13:

9780131472860

Author(s): Liu, Chang
Edition: 1
Released: Jan 01, 2005
Publisher: PRENTICE/HALL
Format: Textbook Binding, 530 pages

Description:

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

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