This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.

Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)

Science & Math

Olthoff, James K.

Christophorou, Loucas G. G.

Chemistry

Springer

See the best price to sell, buy, or rent books by Christophorou, Loucas G. G.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Books by Christophorou, Loucas G. G.

See the best price to sell, buy, or rent books by Christophorou, Loucas G. G.. BookScouter helps to compare book prices from 25+ online bookstores and 30+ buyback vendors with a single search.

Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)